INFICON XTC/C Thin Film Deposition Controller - Manual (Page 22)

1 - 6
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
1.3 Specifications
At the time of this manual’s writing, the specifications for performance are as
published below. INFICON continuously improves its products, affecting the
instrument’s performance.
1.3.1 Specifications XTC/2 and XTC/C
1.3.1.1 General
Usage . . . . . . . . . . . . . . . . . . . . . . Indoor use only.
Altitude Range . . . . . . . . . . . . . . . . Up to 2000 m (6,561 ft)
Pollution Degree . . . . . . . . . . . . . . 1—No pollution occurs
Overvoltage Category . . . . . . . . . . 2—Local level, appliances, etc.
Cleaning . . . . . . . . . . . . . . . . . . . . The unit enclosure can be safely cleaned
with a mild detergent or spray cleaner
designed for that purpose. Care should be
taken to prevent any cleaner from entering
the unit.
1.3.1.2 Measurement
Crystal Range & Precision . . . . . . . 6.0 to 5.0 MHz +/- .05 Hz
(per 250 msec sample)
Thickness & Rate Resolution . . . . . 0.0617Å (per 250 msec sample)
Material density = 1.0; Z-Ratio = 1.0;
crystal frequency = 6 MHz.
Å/S/M = Angstroms/second/measurement.
Thickness accuracy . . . . . . . . . . . . 0.5%
Measurement frequency . . . . . . . . 4 Hz
1.3.1.3 Source Controls
Source-Control Voltage . . . . . . . . . 0 to +/- 10 v
Number of Sources . . . . . . . . . . . . 2
Resolution . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 v)
Update Rate . . . . . . . . . . . . . . . . . 4 Hz max.
Maximum Load . . . . . . . . . . . . . . . 400 Ohm (100 Ohm internal impedance)