6 remote command – INFICON XTC/C Thin Film Deposition Controller User Manual

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XTC/C - XTC/2 Operating Manual

3.8.5.6 Remote Command

The format of the remote command is:

R xx vvv

where:

R . . . . . . Is the literal R

xx . . . . . Is the remote code per list below.

vvv . . . . . Is the associated value needed for some remote commands.

R0 . . . . . Start. Equivalent to pressing the START key.

R1 . . . . . Stop. Equivalent to pressing the STOP key.

R2 . . . . . Reset. Equivalent to pressing the RESET key.

R3 . . . . . Remote Lock On. Prohibits any parameter from being entered via the

front panel.

R4 . . . . . Remote Lock Off. Clears remote lock condition.

R5 . . . . . Crystal fail inhibit on. Simulates remote input.

R6 . . . . . Crystal fail inhibit off. Simulates release of remote input.

R7 . . . . . Soak hold 2 on. Simulates remote input.

R8 . . . . . Soak hold 2 off. Equivalent release of remote input.

R9 . . . . . Manual on. Equivalent to front panel MPWR keystroke.

R10 . . . . Manual off. Equivalent to front panel MPWR keystroke.

R11 . . . . Set power level vv. Sets the active source’s power to vv%.

R12 . . . . Zero thickness. Simulates remote input or front panel ZERO

keystroke.

R13 . . . . Final thickness trigger. Simulates remote input.

R14 . . . . CrystalSwitch. Equivalent to front panel XTSW keystroke.

R15 . . . . Enter communication I/O mode - See R16 (Only applies when in

communication I/O mode)

R16 . . . . Exit communication I/O mode - See R15 (Only applies when in

communication I/O mode)

R17 . . . . Set (close) relay xx (xx = 1-12)

R18 . . . . Clear (open) relay xx (xx = 1-12)

R19 . . . . Turn backlight ON

R20 . . . . Turn backlight OFF

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