SHIMPO 921A User Manual
Page 27
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TRICOR Systems Inc.
5.3
If the operator wants to proceed to the next service mode step, press TEST/
READY, as required.
5.1.6 Displacement Verification
This step allows verifying the system displacement accuracy.
Appendix D provides the detailed instructions for verification of the system
displacement.
If the operator wants to proceed to the next service mode step, be sure the
platform is properly setup (see warning above), then press TEST/READY, as
required. In this case the next step is again Force Calibration (para. 5.1.1).
The sequence can be repeated as often as desired.
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