SHIMPO 921A - Manual (Page 48)

D.1
TRICOR Systems Inc.
APPENDIX D
Displacement Verification Procedure
Test Tool Required: Force/Displacement Gauge Fixture PN 905-378
Displacement Gauge: Mitutoyo PN 543-146 (or Equivalent)
Figure D.1 Fixture with Gauge
WARNING
The Service Mode operates the moving platform
at some service mode steps. Never operate the
unit without the platform properly setup with the
test fixture height adjusted to provide a suitable
stop for the platform force transducer.
Step 1 Adjust the height of the Drive Mechanism to provide a suitable
stop for the drive mechanism force transducer.
Align Parallel
2-204-28