Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual
Page 11
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instruments
Set Run State
Command:
U
Description: Sets the instruments operating state.
Parameters:
0 = Start Process
5 = Force Final Thickness
1 = Stop Process
6-30 = Start Process 1-25
2 = Start Layer
31 = Soak/Hold
3 = Stop Layer
32 = Zero Thickness
4 = Next Layer
33 = Zero Time
Example:
To start process 2, send: U7
Get Run State
Command:
V
Description: Returns the Phase of the active process.
Parameters:
0 = Stopped
8 = Ramp 2
16 = Feed Ramp
1 = Crystal Verify
9 = Soak 2
17 = Feed Soak
2 = Initialize Layer
10 = Soak Hold
18 = Idle Ramp
3 = Manual Start Layer
11 = Shutter Delay
19 = Start Next layer
4 = Pocket Rotate
12 = Deposit
20 = Crystal Fail
5 = PreCond
13 = Rate Ramp
21 = Stop Layer
6 = Ramp1
14 = Rate Ramp Deposit
22 = Manual Power
7 = Soak 1
15 = Timed Power
23 = Pocket Timeout
Example:
To read the run state, send: V
The return string for the Deposit Phase is: 12