Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual
Page 7
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Get/Set Material Parameters
Command:
F
Description: Gets/Sets the parameters of the 100 stored materials.
Parameters: Name_Density_ZFactor
Note: The name must be sent as 15 characters. Material#’s higher than 9
require the use of an ASCII table. The letter “9” is ASC(58), the next letter in the
ASCII table is “:”, ASC(59) – Material10. Material11 is “;” ASC(60), etc.
Example:
To Get the Material 1 parameters, send: F1?
The return string would be of the form:
Aluminum 2.73 1.080
To Set the Material 1 parameters send:
F1Aluminum 2.73 1.080
Get/Set Input Parameters
Command:
G
Description: Gets/Sets the logical function of each of the 8 digital inputs.
Parameters:
1
Start Process
32
Soak Hold
2
Abort Process
33
Zero Thickness
3
Start Layer
34
Zero Time
4
Stop Layer
35
Pocket Ready
5
Start Next Layer
36
Not Used
6
Force Final Thick
7-31
Start Process 1-25
Example:
To Get input functions, send: G?
The return string for Start Layer on input 1, all other None would be:
3 36 36 36 36 36 36 36
To Set the Input 2 to Stop Layer you would send:
G1 3 4 36 36 36 36 36 36