Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual

Page 7

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Σ

Sigma

instruments

Get/Set Material Parameters

Command:

F

Description: Gets/Sets the parameters of the 100 stored materials.

Parameters: Name_Density_ZFactor

Note: The name must be sent as 15 characters. Material#’s higher than 9
require the use of an ASCII table. The letter “9” is ASC(58), the next letter in the
ASCII table is “:”, ASC(59) – Material10. Material11 is “;” ASC(60), etc.

Example:

To Get the Material 1 parameters, send: F1?

The return string would be of the form:

Aluminum 2.73 1.080

To Set the Material 1 parameters send:

F1Aluminum 2.73 1.080

Get/Set Input Parameters

Command:

G

Description: Gets/Sets the logical function of each of the 8 digital inputs.

Parameters:

1

Start Process

32

Soak Hold

2

Abort Process

33

Zero Thickness

3

Start Layer

34

Zero Time

4

Stop Layer

35

Pocket Ready

5

Start Next Layer

36

Not Used

6

Force Final Thick

7-31

Start Process 1-25

Example:

To Get input functions, send: G?

The return string for Start Layer on input 1, all other None would be:

3 36 36 36 36 36 36 36

To Set the Input 2 to Stop Layer you would send:

G1 3 4 36 36 36 36 36 36

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