Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual
Page 8
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instruments
Get/Set Relay Parameters
Command:
H
Description: Gets/Sets the logical function of each of the 16 relays.
Parameters:
1
Source 1 Shutter
13
Max. Power
2
Source 2 Shutter
14
Stopped
3
Sensor 1 Shutter
15
Time Setpoint
4
Sensor 2 Shutter
16
Thick Limit
5
All Crystals Fail
17
Final Thickness
6
Sensor 1 Fail
18-25 Pocket 1-8
7
Sensor 2 Fail
26
Dual Xtal Shutter
8
Deposit Phase
27
None
9
PreCond Phase
10
SoakHold Phase
11
Process Active
12
Manual Mode
Example:
To Get Relay functions, send: H?
The return string for Sensor 1 Shutter on Relay 1, all other None would
be:
3 27 27 27 27 27 27 27
To Set the Relay 2 to Process Active you would send:
G3 11 27 27 27 27 27 27
Command:
J
Parameters: None.
Description: Read the number of channels installed. The number of channels will be
either an ASCII two or six.
Example:
J
A2
The unit has two channels available.