Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual

Page 8

Advertising
background image

120 Commerce Drive

Fort Collins, Colorado 80524

(970) 416-9660

Fax (970) 416-9330

Σ

Sigma

instruments

Get/Set Relay Parameters

Command:

H

Description: Gets/Sets the logical function of each of the 16 relays.

Parameters:

1

Source 1 Shutter

13

Max. Power

2

Source 2 Shutter

14

Stopped

3

Sensor 1 Shutter

15

Time Setpoint

4

Sensor 2 Shutter

16

Thick Limit

5

All Crystals Fail

17

Final Thickness

6

Sensor 1 Fail

18-25 Pocket 1-8

7

Sensor 2 Fail

26

Dual Xtal Shutter

8

Deposit Phase

27

None

9

PreCond Phase

10

SoakHold Phase

11

Process Active

12

Manual Mode

Example:

To Get Relay functions, send: H?

The return string for Sensor 1 Shutter on Relay 1, all other None would
be:

3 27 27 27 27 27 27 27

To Set the Relay 2 to Process Active you would send:

G3 11 27 27 27 27 27 27

Command:

J

Parameters: None.

Description: Read the number of channels installed. The number of channels will be

either an ASCII two or six.

Example:

J

A2

The unit has two channels available.

Advertising