Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual

Page 3

Advertising
background image

120 Commerce Drive

Fort Collins, Colorado 80524

(970) 416-9660

Fax (970) 416-9330

Σ

Sigma

instruments

SQC-122 Commands

Get Model

Command:

@

Description: Returns the model number and software version number.

Parameters: None

Example:

The @ command returns “SQC122 Ver 2.08”

Get/Set Film Parameters

Command:

A

Description: To Get film parameters, send the command then the film number and a ?.

To set film parameters send the command, then the film number and film
Name, followed by a space, then each film parameter separated by a
space (spaces are shown below as an _ for clarity only):

Parameters: P_I_D_Sensor1_Sensor2_Sensor3_Sensor4_Sensor5_Sensor6_

Ouput_MaxPwr_Slew_Material#_R1Pwr_R1Tme_S1Time_
R2Pwr_R2Time_S2Time_IdlePwr_IdleTime_Pocket_Tooling_
XtalQual_XtalStab_XtalFail_ShtrDly_ShtrCapture_CtrlErr_Ctrl%_
SampleRate_SampleAcc_SampleHold_FeedPwr_FeedRamp_FeedTime

Note: All parameters must be sent, and in the order shown. The name
must be sent as 15 characters. Film#’s higher than 9 require the use of
an ASCII table. The letter “9” is ASC(58), the next letter in the ASCII table
is “:”, ASC(59) – that selects Film10. Film 11 is “;” ASC(60), etc.

Example:

To Get the parameters of Film 1, send: A1?
The return string would be of the form: FILM 1 60 25 0 1 0 0 0 0…..
To Set the parameters of Film 1, send: A1FILM_1 60 25 0 1 0 0 0 ..

Note: Numeric film parameter values are sent and received as integers.
To convert between the integer value and the parameter’s actual value,
you must multiply or divide by the number of decimal digits in the
displayed parameter.

Advertising