Sigma – INFICON SQC-122C Thin Film Deposition Controller Communications Manual User Manual

Page 6

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Σ

Sigma

instruments

Get/Set Layer Parameters

Command:

D

Description: Most layer parameters are directly related to a setting on the layer edit

screen.

The Next Layer parameter needs some explanation. A process is formed
by a “linked list” of layers. We have already seen that Layer 1 in a
process is found in the First Layer (process parameter). That layer has a
Next Layer (layer parameter) that points to the next layer in the process.
This continues until the last layer in the process, where the Next Layer
parameter will be –1.

Parameters: Rate_FinalThick_TimeSetPt_ThickLimit_Film#

_NextLayer_StartMode_Available

Example:

Assume that Process 1 has two layers.

Get the Layer count for Process 1: C1?

If the first layer is Layer #1 (of 250 layers) the return is: Process1 2 1

Get the Layer parameters for Layer 1: D001?

The response might be: 3.0 0.920 0 0.942 1 3 1 0

Note that the 6

th

parameter points to layer 3

At this point you could read the Next Layer parameter for Layer 3 (it will be –1), or stop
(since we already know there are two layers).

Delete All Layers

Command:

E

Description: Deletes all 250 layers! Most often used to clear the entire layer list in

preparation downloading a new list.

Parameters: None

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