INFICON SQC-122C Thin Film Deposition Controller Communications Manual - Manual (Page 9)

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Σ
Sigma
instruments
Get Sensor Rate
Command: L
Description: Returns the sensor rate for the requested sensor.
Parameters: Sensor Number
Example: To Get Sensor 1 rate, send: L1
The return string is of the form: 1.00
Get Output Rate
Command: M
Description: Returns the average rate of all sensors assigned to the requested output.
Parameters: Output Number
Example: To Get Output 1 rate, send: M1
The return string is of the form: 1.00
Get Sensor Thickness
Command: N
Description: Returns the thickness reading for the requested sensor.
Parameters: Sensor Number
Example: To Get Sensor 1 thickness, send: N1
The return string is of the form: 1.000