INFICON Front Load Single Sensor - Manual (Page 77)

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Front Load Single and Dual Sensors Operating Manual
Chapter 5
Troubleshooting
5.1 Troubleshooting Tools
If the Front Load Sensor fails to function, or appears to have diminished
performance, diagnose the sensor using one or more of the following:
 Symptom, Cause, Remedy chart (see section 5.1.1 )
 Digital Multimeter (see section 5.1.2 on page 5-3 )
 Crystal Sensor Emulator (see section 5.1.3 on page 5-10 )
5.1.1 Symptom, Cause, Remedy
The Symptom, Cause, Remedy chart can help identify the causes of, and solutions
to, sensor problems and related issues (see
Table 5-1 ).
Table 5-1 Symptom, Cause, Remedy
SYMPTOM CAUSE REMEDY
Large jumps of thickness
reading during deposition. Mode hopping due to damaged
or heavily damped crystal. Replace the crystal.
Crystal is near the end of its life.
Scratches or foreign particles on
the crystal holder seating
surface. Clean or polish the crystal
seating surface of the crystal
holder. Refer to
section 4.3.2 on
page 4-6 .
Uneven coating. Mount the sensor with the
crystal face perpendicular to the
evaporant stream. Refer to
section 2.2 on page 2-4 .
Particles on the crystal. Remove source of particles and
replace the crystal.