Chapter 1 introduction, 1 introduction, Chapter 1 – INFICON Q-pod Thin Film Deposition Monitor User Manual
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Q-pod Operating Manual
Chapter 1
Introduction
1.1 Introduction
The INFICON Q-pod™ Transducer is a small, inexpensive and accurate way to
measure thin film depositon rate and thickness. No external oscillator or power
source is required.
The included Q-pod software displays rate, thickness, frequency, crystal life and a
graph of rate versus time, for up to 8 Q-pods simultaneously. Q-pod readings can
be logged to disk in spreadsheet friendly comma-delimited format.
There are also sample files included, written in Labview, Java and Visual Basic to
help aid in the integration of the Q-pod into a system that is managed via software.
See section
section 3.5, Sample Programs, on page 3-4
for more details.
Figure 1-1 Q-pod
When reading this Q-pod manual, please pay particular attention to the NOTES,
CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and
Warnings are defined in
. Also, note the general warnings
in