2 general cautions and warnings, Caution, Warning – INFICON Q-pod Thin Film Deposition Monitor User Manual
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Q-pod Operating Manual
1.2.2 General Cautions and Warnings
CAUTION
Do not open the instrument case! There are no
user-serviceable components within the instrument
case.
Refer all maintenance to technically qualified personnel.
WARNING
Failure to operate the Q-pod in the manner intended by
INFICON can circumvent the safety protection provided
by the instrument and may result in personal injury.
CAUTION
Q-pod may not be suitable for use with RF sputtering
systems or other electrically noisy environments.
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