INFICON XTC/C Thin Film Deposition Controller - Manual (Page 103)

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XTC/C - XTC/2 Operating Manual
For example:
(serial poll) CALL IBRSP (XTC2%,SPR%)
B = SPR% / 64 : B = INT(B)
IF B = 1 THEN (continue prog) ELSE (serial poll)
If the RQS bit is set, the program may then be made to read the first 4 bits of
the Status Byte (2^0 through 2^3) to determine what event generated the
service request. Once this is determined the appropriate action may be taken.
3.9 Co-Deposition (Two Unit Interconnection)
It is possible to control two (or more) sources simultaneously by interconnecting
multiple XTC units. This is most easily accomplished by interconnecting the
inputs and outputs of the units as shown in
Figure 3-8 on page 3-40 .
Two user installed components are suggested. An "External Start" switch is
used to synchronize the initiation of the two units' films by simultaneously
applying a signal to the START input on the System I/O. The relay inverter is
used to ensure that both units enter the DEPOSIT state simultaneously.
When using the suggested configuration:
Š A STOP condition in either unit stops the other unit. Pushing the STOP key
on either instrument stops both instruments.
Š The unit that first reaches FINAL THK triggers the End Deposit input of the
other unit.
Š The unit designated "slave" must be programmed to reach the end of the
SOAK 2 state before the "master" to avoid a delay upon the termination of
the Soak Hold.
Š The operator must ensure that both units are in the READY state before
pressing the External Start Switch.
Š If a STOP is encountered and a rework layer is not desired (see section 4.4
on page 4-10 ), a RESET command must be individually given to each unit.
Š If there is material cross sensitivity (if an instrument's transducer receives
material from more than one source) the TOOLING or FINAL THK
parameter(s) must be adjusted to account for this condition.
Š It may be necessary to adjust the Z-Ratio to account for the mixing of
materials on the sensors. This is especially important if maintaining
composition over extended runs is critical.