INFICON XTC/C Thin Film Deposition Controller - Manual (Page 124)

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XTC/C - XTC/2 Operating Manual
When in READY, a crystal switch is activated by depressing the red button on
the body of the controller. This action alternates the active crystal of a dual head
configuration or advances the active crystal of a CrystalSix to the next available
good crystal. This may be done any time the instrument is not in STOP.
NOTE: Upon leaving the MANUAL POWER state the instrument enters the
DEPOSIT state. The deposition will terminate if the FINAL THK
parameter value has been exceeded.
The ship kit includes a convenience hook for the controller that can be attached
to the instrument or other accessible location.
4.9 Setting the Soak and Idle Power Levels
These instruments provide 0 to +/- 10 Volts source power control from the
SOURCE # connectors on the rear panel. The voltage output is proportional to
the percent power display with 50% power outputting 5 volts. The control
voltage polarity is set by the appropriate configuration switch, refer to
section
2.6.2 on page 2-19
NOTE: The maximum voltage output is limited by the value of the MAX PWR
parameter of each film.
4.9.1 Setting Soak Power 1 Parameters
SOAK PWR 1 is typically set at a level that produces a source temperature just
below significant evaporation. This is easily translated into a power percentage
(SOAK PWR 1) with the help of the hand held controller or the
keys
when in manual power mode. Slowly bring the power level to a level where
melting is just beginning and then note the power percentage value on the LCD
display. Use this value for the SOAK PWR 1 setting. This power level may also
be used in fast coaters for a non-zero Idle Power. Set the associated Rise Time
and Soak Time to insure that the melting does not cause violent turbulence but
does not waste excessive time.
4.9.2 Setting Soak Power 2 Parameters
SOAK PWR 2 is typically set at a level that is just below the power that is used
for maintaining the selected evaporation rate. This is determined by manually
bringing the power level up to the desired rate and then entering automatic rate
control. Allow the source to stabilize, then note the average power on the
display. Use this value or one slightly lower for the SOAK PWR 2 value. Set the
associated rise and soak times long enough to insure that the melting does not
cause violent spattering, but short enough that expensive materials are not
wasted.