INFICON XTC/C Thin Film Deposition Controller - Manual (Page 128)

4 - 24
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
4.15 Crystal Switch Details
A crystal switch will automatically occur when:
Š The instrument is configured for a dual head, a layer is running on the
primary sensor, and the primary crystal fails.
Š The instrument is configured for a CrystalSix, a layer is running, and there
is at least one good crystal left in the carousel when the active crystal fails.
Š The instrument is configured for a dual head or single heads, a START is
executed and the designated primary sensor is different than the last sensor
run. This switch will take place before entering a RISE 1 or RISE 2 state.
NOTE: When using a dual head, a layer cannot START if the primary crystal
for that layer is failed, unless the "start layer without backup crystal"
configuration switch is activated; see
section 2.6.2 on page 2-19
and section 4.16 on page 4-26 .
Š A soft crystal failure is generated; refer to section 4.6 on page 4-14 .
A crystal switch will NOT automatically occur:
Š In STOP, READY or IDLE.
Š When the designated primary sensor is already failed at the START of a
layer. A STOP will occur unless the "proceed without backup" configuration
switch is chosen; see
section 4.16 on page 4-26 .
Š When the secondary crystal of a dual head fails. (A TIME-POWER or STOP
will occur.)
A crystal switch can be manually executed via the front panel, handheld
controller, or remote communications any time the system is configured for
Dual or CrystalSix.
NOTE: The primary sensor # of a Dual head is the sensor programmed in the
film’s parameters. The secondary sensor is the other sensor. On the
XTC/2 Display, the active crystal’s number is illuminated. If the primary
crystal has failed, the active crystal’s number (backup) flashes to
indicate that there is no backup.
CrystalSix crystals are all read on power up to determine how many good
crystals are present. On power up, when configured for a CrystalSix sensor, the
XTC/2 display will be blank except for the CrystalSwitch and STOP
annunciators. Once the initialization is complete the XTC/2 will automatically go
to the Operate Display. On the XTC/2 Display, the annunciators of the good
crystals are illuminated, with the active crystal’s number flashing. The XTC/2
will identify a CrystalSix switcher fail by turning off all the crystal annunciators.
A CrystalSix switcher fail will occur if the CrystalSix carousel fails to rotate
properly.
NOTE: The crystal fail annunciator is illuminated when no more good crystals
remain for both the XTC/2 and the XTC/C.