INFICON XTC/C Thin Film Deposition Controller - Manual (Page 161)

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XTC/C - XTC/2 Operating Manual
6.4 Replacing the Crystal
The procedure for replacing the crystal is basically the same with all
transducers, except the CrystalSix.
CAUTION
Always use clean nylon lab gloves and plastic
tweezers for handling the crystal (to avoid
contamination which may lead to poor adhesion of the
film to the electrode).
Do not rotate the ceramic retainer assembly after it is
seated (as this will scratch the crystal electrode and
cause poor contact).
Do not use excessive force when handling the ceramic
retainer assembly since breakage may occur.
NOTE: Certain materials, especially dielectrics, may not adhere strongly to the
crystal surface and may cause erratic readings.
Thick deposits of some materials, such as SiO, Si, and Ni will normally
peel off the crystal when it is exposed to air, as a result of changes in
film stress caused by gas absorption. When you observe peeling,
change the crystals.
6.4.1 Standard and Compact
Follow the procedure below to replace the crystal in the Standard and Compact
sensor:
1 Gripping the crystal holder with your fingers, pull it straight out of the sensor
body.
2 Gently pry the crystal retainer from the holder (or use crystal snatcher; see
Figure 6-6 on page 6-17 ).
3 Turn the retainer over and the crystal will drop out.
4 Install a new crystal, with the patterned electrode face up.
5 Push the retainer back into the holder and replace the holder in the sensor
body.