INFICON XTC/C Thin Film Deposition Controller - Manual (Page 163)

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XTC/C - XTC/2 Operating Manual
6.4.3 Bakeable Sensor
For the Bakeable sensor, the procedure is the same as the regular crystal
except that you must first unlock the cam assembly by flipping it up. Once the
crystal has been replaced, place a flat edge of the holder flush with the cam
mechanism and lock it in place with the cam (
Figure 6-4 ).
Figure 6-4 Bakeable Crystal Sensor (Exploded)
Crystal Holder &
Retainer Spring
IPN 007-154
Crystal IPN 008-010-G10 (Package of 10)
Fully Coated Face (Gold)
Crystal Retainer IPN 007-064
Clamping Spring IPN 007-094
Spreader Bar
IPN 007-267-P2
Shoulder Washer
IPN 007-268-P1
Two Required
Shoulder Washer
IPN 007-269-P1
Cam Mechanism
IPN 007-168
Cover
IPN 007-101
Contact IPN 007-099
Insulator IPN 007-103