INFICON XTC/C Thin Film Deposition Controller - Manual (Page 51)

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XTC/C - XTC/2 Operating Manual
2.6.4 System I/O
A 25-pin male "D" type connector for interface connection. (See Figure 2-14 on
page 2-24 and section 3.7 on page 3-15 for details.)
Pin # Function
Relay# Outputs
1 1,2 Source Shutter 1
2 3,4 Source Shutter 2
3 5,6 Sensor Shutter 1*
4 7,8 Sensor Shutter 2*
5 9,10 STOP
6 11,12 End of Process
*Also used for crystal switch, see section 4.15.1 on page 4-25
Input # Inputs
13,14,15,16,17 INPUT Common (GND)
1 18 START deposition
2 19 STOP deposition
3 20 END deposit
4 21 Sample initiate
5 22 Sample inhibit
6 23 Crystal fail inhibit
7 24 ZERO thickness
8 25 Soak 2 HOLD