INFICON XTC/C Thin Film Deposition Controller - Manual (Page 57)

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XTC/C - XTC/2 Operating Manual
2.7 Operation as a Deposition Monitor
Although this instrument is designed as a multi-layer process controller, it is
also easily used as a rate and thickness deposition monitor. In addition, it is
easily used for many other types of mass measurement applications.
The following discussion is divided into four segments. The first is for
applications that do not require a source shutter. The second relates to those
that use a source shutter. The third section is a simple application of the
instrument for manual rate sampling. The fourth segment is directed towards
those applications that are nontraditional; including biological, electroplating,
etching and the measurement of liquid samples.
2.7.1 Monitoring - Systems Without a Source Shutter
To operate the instrument as a film rate/thickness monitor only the following
three parameters need to be programmed. Press the PROG key to place the
display in the program mode and enter the appropriate values for:
DENSITY . . . . . . . . . . . . . . . . . . . Depends on the material to be measured,
see Appendix A, Table of Densities and
Z-ratios .
Z-RATIO . . . . . . . . . . . . . . . . . . . . Depends on the material to be measured,
see Appendix A, Table of Densities and
Z-ratios .
TOOLING 1,2 . . . . . . . . . . . . . . . . Corrects for the geometrical differences
between the sensor and the substrate, see
section 5.3 on page 5-2 . TOOLING 2 is
used for the backup sensor when a dual
head is used.
Properly mount and attach the appropriate transducer (see section 3.5 on page
3-7 ).
Set the rear panel configuration switches for the appropriate transducer type;
refer to
section 2.6.2 on page 2-19 .
Press the PROG key to change the display between the program and operate
modes.
A STOP is cleared by pressing the START or RESET switch. RESET starts the
process over (i.e., at the beginning of Layer 1).
Pressing the ZERO key at any time sets the displayed thickness to 000.0 KÅ.
The Rate display group will indicate the evaporation rate and the Thickness
display group will increment accordingly. The front panel controls work
normally.