INFICON XTC/C Thin Film Deposition Controller User Manual

Page 81

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3X

XTC/C - XTC/2 Operating Manual

12

11,12

END Deposit

When FINAL THK is
exceeded for two
consecutive
measurements

Entry of READY
state

** Function may be overwritten by Remote Communications Commands R15 - R18,
see

section 3.8.5 on page 3-26

.

Table 3-5 Open Collector Outputs* (one of eight encoding)

Output #

Low

High

1

18

Crucible Select 1

If the active layer's designated
crucible is 1, or 0

Balance

2

19

Crucible Select 2

If the active layer's designated
crucible is 2

Balance

3

20

Crucible Select 3

If the active layer's designated
crucible is 3

Balance

4

21

Crucible Select 4

If the active layer's designated
crucible is 4

Balance

5

22

Crucible Select 5

If the active layer's designated
crucible is 5

Balance

6

23

Crucible Select 6

If the active layer's designated
crucible is 6

Balance

7

24

Crucible Select 7

If the active layer's designated
crucible is 7

Balance

8

25

Crucible Select 8

If the active layer's designated
crucible is 8

Balance

* The crucible select outputs are open collector type, 5 volt maximum with a capability
of sinking 5 TTL loads (10 mA)

Table 3-4 Aux I/O Connector (continued)

Relay #

Pin #

Function**

Closed Contacts

Open Contacts

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