4 source outputs, 8 computer communications, 1 communications setup – INFICON XTC/C Thin Film Deposition Controller User Manual

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XTC/C - XTC/2 Operating Manual

3.7.4 Source Outputs

The source outputs will drive +/- 10.00 volts into a 400 ohm load. The output is
proportional (15 bits) to the required source power. It is normal for ripple to
appear on these outputs to a maximum of 50mV at ~84 Hz. The polarity is set
with a configuration switch; see

section 2.6.2 on page 2-19

. This output is

updated every 250 milliseconds.

3.8 Computer Communications

This instrument supports a number of standard and optional computer
communications protocol formats. RS232 is standard, operating in either
checksum or non-checksum as well as SECS II formats. It may also be
configured to automatically output process data (data logging) upon reaching
FINAL THK. Additionally, an IEEE communications option may be installed.

3.8.1 Communications Setup

To set up the remote communication interface, when powering up the XTC/2,
hold down the 0 key. The following set of parameters can be entered using the
digits, enter, and clear keys.

When this list is complete, the READY message is flashed and the choice will
be given to either repeat the list or continue with normal operation. Pressing
ENTER will continue with normal operation. Pressing CLEAR will repeat the list.

tyPE

(0 = INFICON Checksum, 1 = INFICON no checksum, 2 = SECS, 3 = Datalog)

(If SECS is chosen for tyPE the next 5 parameters are accessed):

d Id

(Device ID 0-32767)

t1

(Timer 1 per SECS definition) (0-10.0 seconds)

t2

(Timer 2 per SECS definition) (0.2-25.0 seconds in 0.2 increments)

rtrY

(Retry limit per SECS definition) (0-31)

dUPL

(Duplicate block per SECS definition)

baUd (0=1200, 1=2400, 2=4800, 3=9600)

IEEE

(IEEE address, 0-30) - requires optional hardware

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