3 indicators and switches, 1 <run> led, 2 <err> led – INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) User Manual

Page 10: 3 <la> led (<in> port), 4 <la> led (<out> port)

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3 indicators and switches, 1 <run> led, 2 <err> led | 3 <la> led (<in> port), 4 <la> led (<out> port) | INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) User Manual | Page 10 / 58 3 indicators and switches, 1 <run> led, 2 <err> led | 3 <la> led (<in> port), 4 <la> led (<out> port) | INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) User Manual | Page 10 / 58
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