INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) User Manual
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tira85e1 (2013-06) PxG55x.cp
Contents
General Information
2
Intended Use
2
EtherCAT–Interface 2
Product Identification
2
Validity
3
Trademark 3
Patents
3
Contents 4
1
Technical Data
6
2
Interface Connection
8
3
Operation 9
3.1
Introduction 9
3.2
Front View
9
3.3
Indicators and Switches
10
3.3.1
<RUN> LED
10
3.3.2
<ERR> LED
10
3.3.3
<LA> LED (<IN> Port)
10
3.3.4
<LA> LED (<OUT> Port)
10
3.3.5
Device Address Switch
11
4
Object Structure
12
4.1
Object Dictionary structure
12
4.2
Communication Profile Objects (0x1000…0x1FFF)
13
4.2.1
TxPDO’s PSG
14
4.2.2
TxPDO’s PCG
14
4.3
Manufacturer-specific Profile Objects (0x2000...0x5FFF)
15
4.3.1
Manufacturer Information Common
15
4.3.2
Manufacturer Configuration Module 1
16
4.3.3
Manufacturer Configuration Module 2 (PCG with or without ATM only)
16
4.3.4
Manufacturer Configuration Module 3 (PCG with ATM only)
16
4.4
Input Area PCG with ATM (0x6000…0x6FFF)
17
4.4.1
Input Common
17
4.4.2
Input Capacitance Diaphragm
17
4.4.3
Input Common
18
4.4.4
Input Piezo
18
4.4.5
Input Common
18
4.4.6
Input Heat Transfer
19
4.4.7
Input Trip Point 1
19
4.4.8
Input Trip Point 2
19
4.5
Input Area PCG without ATM (0x6000…0x6FFF)
20
4.5.1
Input Common
20
4.5.2
Input Capacitance Diaphragm
20
4.5.3
Input Common
21
4.5.4
Input Heat Transfer
21
4.5.5
Input Trip Point 1
21
4.5.6
Input Trip Point 2
22
4.6
Input Area PSG (0x6000…0x6FFF)
22
4.6.1
Input Common
22
4.6.2
Input Heat Transfer
22
4.6.3
Input Trip Point 1
23
4.6.4
Input Trip Point 2
23
4.7
PCG with ATM Configuration Area (0x8000…0x8FFF)
23
4.7.1
Configuration Common Module
23
4.7.2
Configuration Capacitance Diaphragm
24
4.7.3
Configuration Trip Point 1
24
4.7.4
Configuration Trip Point 2
26
4.8
PCG without ATM, Configuration Area (0x8000…0x8FFF)
27
4.8.1
Configuration Common Module
27
4.8.2
Configuration Capacitance Diaphragm
27
4.8.3
Configuration Trip Point 1
27
4.8.4
Configuration Trip Point 2
29
4.9
PSG Configuration Area (0x8000…0x8FFF)
30
4.9.1
Configuration Trip Point 1
30
4.9.2
Configuration Trip Point 2
32