INFICON SKY CDGxxxD (EtherCAT) - Manual (Page 3)

tira68e1 (2013-05) CDGxxxD.cp
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This document applies to products of the temperature controlled CDG045D,
CDG045D2, CDG100D, CDG100D2, CDG160D and CDG200D series with
EtherCAT interface.
Part numbers of standard products are indicated below. OEM products have other
part numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.
3Cx1-xxx-2380
1  DN 16 ISO-KF
3  DN 16 CF-R
9  1/2" tube
E  8VCR female
H  8VCR female long tube
C  45°
D  100°
E  160°
F  200°°
3  0.1
4  0.25
5  0.5
6  1
7  2
8
 5
9  10
A  20
B  50
C  100
D  200
E  500
F  1000 (Torr only)
G  1100 (mbar only)
5  Torr (x 133 Pa; x 1.3 mbar)
6  mbar (x 100 Pa)
Measurement range
(F.S.)
Unit
Sensor temperature
Flange
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document corres-
pond to CDG045D gauges with the DN 16 ISO-KF vacuum connection. They apply
to other vacuum connections and to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.
EtherCAT ® Beckhoff Automation GmbH, Deutschland
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Validity
Trademark
Patents