INFICON SKY CDGxxxD (EtherCAT) - Manual (Page 32)

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tira68e1 (2013-05) CDGxxxD.cp
Appendix
 [1] www.inficon.com
Operating Manual
CDG045D
tina51d1 (German)
tina51e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [2] www.inficon.com
Operating Manual
CDG100D
tina52d1 (German)
tina52e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [3] www.inficon.com
Operating Manual
CDG160D, CDG200D
tina53d1 (German)
tina53e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [4] ETG.1000.2: Physical Layer service definition and protocol specification
 [5] ETG.1000.3: Data Link Layer service definition
 [6] ETG.1000.4: Data Link Layer protocol specification
 [7] ETG.1000.5: Application Layer service definition
 [8] ETG.1000.6: Application Layer protocol specification
 [9] ETG.1020: EtherCAT Protocol Enhancements
 [10] ETG.2000: EtherCAT Slave Information
 [11] ETG.5001.1: Modular Device Profile – Part 1: General MDP Device
Model
 [12] ETG.5003.1: Semiconductor Device profile – Part 1: Common Device
Profile (CDP)
 [13] ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific
Device Profile (SDP): Vacuum Pressure Gauge
 [14] IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications
 [15] IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3
 [16] SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR
NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES
 [17] SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers
A: Literature