Startup without using vacuum, A) to fill the system, Procedure: actions – Bronkhorst CEM W-300B User Manual
Page 21
Startup without using Vacuum
Liquid
4
3
5
6
8
10
11
9
MFC
Carrier
Processgas
Vacuum
7
LFM
Inertgassupply
2
Process
Vacuum
Valve
Heatedline
CEM
Liquid
Gas
A) To fill the system:
Procedure:
Actions:
A1)Purge all lines
Close: 3, 5 and 10.
Connect inert gas on carrier gas inlet.
Open : 2, 4, 7, 9 and 11.
Give setpoint to gas controller, the control
valve 8 opens.
Give setpoint = 0 to liquid - flow controller
Purge for a long time.
A2) Pressurize liquid supply.
Close 4, give right pressure on inert gas
supply. Open 3.
A3) Fill the system with liquid.
(1)
Let gas flow in the carrier gas line during
filling of the system.
Open 5 briefly, allow mixing valve 6 to fill.
Wait until all gas bubbles left the system,
then close 7.
A4) The system is now ready for use.
1
Make sure that the carrier gas is always flowing when the liquid flow is on. Preferably,
let always gas flow in the carrier gas line when the system is filled with liquid.
App. 1, page 5