Trebor Q-Series Di Water Heater - Manual (Page 3)

Q-SERIES DI HEATER OPERATION / MAINTENANCE MANUAL PAGE 3
1 INTRODUCTION
Q-SERIES DI WATER HEATER
TREBOR’s Q-Series DI water heater will meet your most stringent
application requirements for process cleanliness and temperature control.
Our unique heater design virtually eliminates the potential for metal
contamination due to potentially exposed metal heating elements in
immersion style heaters, while process control and reliability are designed
to outperform and outlast other available quartz heating systems.
Trebor’s DI water heater uses a revolutionary heating technology to
provide exceptional process purity and control. Heat is generated using
resistive heating elements conducted to the fluid through quartz tubes
using convective heat transfer. This conductive / convective heating
method allows the heating element to operate at a much cooler
temperature than IR heating systems and provides the basis for a
responsive heating control system.
The heater modules have smooth surfaces with minimal cracks and
crevices, reducing particle traps. Furthermore, no elastomeric O-rings
are used for sealing and the DI water is exposed only semiconductor
grade quartz and high purity polymers.
Trebor’s patented heating module technology is constructed to provide
excellent process control by minimizing hold-up volume and thermal heat
capacitance while maximizing the heat transfer. This also reduces the
consumption of DI water by minimizing temperature transition time and
bypass to drain requirements.
Many product safety features have been incorporated into the Q-Series
heater. Each system has a liquid level sensor, leak sensor, grounded
heater modules, ground fault protection, and redundant control system
interlocks. An electro-mechanical contactor disengages power to the
heaters when a fault condition occurs.
This equipment is built to semiconductor manufacturing industry
requirements of SEMI S2.
This equipment complies with the requirements of the EU guidelines:
Figure 1-1 : 89/392/EEC “European Machinery Directive”
89/336/EEC “European EMC Directive”