Igure, Quivalent, Hase – INFICON RQCM - Quartz Crystal Microbalance Research System User Manual

Page 69: Rror, Ue to, Mperfect, Apacitance, Ancellation

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RQCM – RESEARCH QUARTZ CRYSTAL MICROBALANCE

THEORY OF OPERATION

5-17

5.7.3

FREQUENCY ERROR DUE TO IMPERFECT CAPACITANCE CANCELLATION

The effect of imperfect electrode capacitance cancellation can also be viewed as an equivalent

phase error. This error is directly proportional to crystal resistance. The equivalent phase error

due to a non-zero shunt capacitance equal to 1 pfd is one degree for a crystal with a series

resistance of 556 Ω. Since the equivalent phase error is proportional to the crystal resistance, a 1-

pfd residual capacitance error will result in a 10-degree equivalent error for a sensing crystal with

a resistance of 5.56 KΩ.

Figure 25 Equivalent Phase Error Due to Imperfect Capacitance Cancellation

Polar Plot of Crystal Conductance

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