INFICON BPG402-SP ATM to Ultra-High Vacuum Gauge (Profibus) User Manual

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tira47e1 (2005-08) BPG402SPv1.cp

This document describes the functionality and programming of the Profibus inter-
face of the BPG402-SP gauge.

For safety information on and technical data of the gauges, please refer
to the respective operating manuals (

→ [1], [3]).

In information referring to the ionization vacuum measuring part of the gauge, the
short designation "BA" (Bayard-Alpert measuring principle) is used.

The designation "Pirani" is used in information referring to the Pirani vacuum
measuring part of the gauge.

In all communications with INFICON, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V W

This document applies to products with part numbers

BPG402-SP (with Profibus interface and switching functions)

353-574

(vacuum connection DN 25 ISO-KF)

353-575

(vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

The BPG402-SP gauge allows vacuum measurement of non flammable gases and
gas mixtures (pressure ranges

→ [1], [3]).

The gauges can be operated with an INFICON controller or another instrument or
control device.

The function of the gauge is described in the operating manual (

→ [1], [2], [3]).

The integrated Profibus interface allows operating the gauge in connection with
other suitable devices in a Profibus network according to the standard described in
[4], [5].

SEMI

®

Semiconductor Equipment and Materials International, California

Profibus

This document contains Profibus-specific information described and
defined in the Profibus Profiles (

→ [4], [6], [7]).

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