INFICON BPG402-SP ATM to Ultra-High Vacuum Gauge (Profibus) - Manual (Page 43)

tira47e1 (2005-08) BPG402SPv1.cp
43
Appendix D: Literature
[1] www.inficon.com
Instruction Sheet
Bayard-Alpert Pirani Gauge
BPG402, BPG402-SD, BPG402-SP
tima46e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Instruction Sheet
Bayard-Alpert Pirani Gauge
BPG402-SD, BPG402-SP
tima47e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Operating Manual
Bayard-Alpert Pirani Gauge
BPG402, BPG402-SD, BPG402-SP
tina46e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.profibus.com
(Profibus user organization)
[5] European Standard for Profibus EN 50170
[6] Profile for Semi-Conductor Devices; Part 1
Common Definitions v1.0; 8/2002
[7] Profile for Semi-Conductor Devices; Part 3
Vacuum Pressure Gauges v1.0; 8/2002