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PEG100 Medium to Ultra-High Vacuum Gauge
Manual
INFICON PEG100 Medium to Ultra-High Vacuum Gauge User Manual
Penning gauge, Peg100
Text mode
Original mode
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tina14e1
Penning Gauge
O
P
E
R
A
T
I
N
G
M
A
N
U
A
L
PEG100
Part Number
351-000
351-002
tina14e1
Penning Gauge
O
P
E
R
A
T
I
N
G
M
A
N
U
A
L
PEG100
Part Number
351-000
351-002
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Table of contents
Document Outline
Contents
Description
General
Purpose
Technical Data
General Data
Measurement System
Signal Output
Control Inputs
Status Output
Mechanical Data
Ambient Conditions
Technical Description
Equipment
Supplied Equipment
Accessories
Operation
Installation
Electrical Connection
Power Supply
Switching on the High Tension
Measurement Signal Output
Status Output
Identification
Start-up
Operation
Measurement System Status Indication
Degassing
Troubleshooting
Maintenance
Service at INFICON
The Electronics Assembly
Cleaning the Sensor
Detaching the Electronics Assembly
Disassembly of the Sensor
Cleaning the Individual Parts
Assembly of the Sensor
Assembly of the Electronics Assembly
Spare Parts List
Disposal
Annex 1 Table 1 Relationship between output voltage and pressure (U = 0.4 V; “not ignited”)
Annex 2
EEC Declaration of Conformity
Declaration of Contamination
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