Disassembly of the sensor, Cleaning the individual parts, 2 disassembly of the sensor – INFICON PEG100 Medium to Ultra-High Vacuum Gauge User Manual
Page 17: 3 cleaning the individual parts caution
3.3.2 Disassembly of the Sensor
The sensor consists of the housing, the anode ring (5/4)
with ignition aid (5/2) and the cathode plate (5/5). See
Fig. 7.
How to disassemble:
1) Use a pair of tweezers to pull the cathode plate (5/5)
out of the sensor.
2) Use a pair of pliers to pull the anode ring out from the
housing; for this move the pliers to and fro a little.
3) Detach the ceramics disc (5/3) from the current feed-
through.
3.3.3 Cleaning the Individual Parts
Caution
Do not damage the sealing surfaces of
the vacuum flange!
In the case of severe contamination, the inside of the
housing may be cleaned with steel wool or similar and
then subjected to further cleaning with alcohol. Finally
blow clean with oil-free pressurized air or nitrogen. Any
possibly present flakes will be removed by blowing these
out of the housing.
If possible, the cathode plate (5/5) should be replaced by
a new cathode plate. The same should be done for the
17
tina14e1 (0106) PEG100.ga
3.3.2 Disassembly of the Sensor
The sensor consists of the housing, the anode ring (5/4)
with ignition aid (5/2) and the cathode plate (5/5). See
Fig. 7.
How to disassemble:
1) Use a pair of tweezers to pull the cathode plate (5/5)
out of the sensor.
2) Use a pair of pliers to pull the anode ring out from the
housing; for this move the pliers to and fro a little.
3) Detach the ceramics disc (5/3) from the current feed-
through.
3.3.3 Cleaning the Individual Parts
Caution
Do not damage the sealing surfaces of
the vacuum flange!
In the case of severe contamination, the inside of the
housing may be cleaned with steel wool or similar and
then subjected to further cleaning with alcohol. Finally
blow clean with oil-free pressurized air or nitrogen. Any
possibly present flakes will be removed by blowing these
out of the housing.
If possible, the cathode plate (5/5) should be replaced by
a new cathode plate. The same should be done for the
anode ring (5/4) with the ignition aid (5/2) and the cera-
17
tina14e1 (0106) PEG100.ga
Fig. 5 Sensor
6
2
5
3
4
1
1
Key to Fig. 5
1 Magnet assembly
2 Ignition aid
3 Ceramics disc
4 Anode ring
5 Cathode plate
6 Sensor housing with flange
Fig. 5 Sensor
6
2
5
3
4
1
1
Key to Fig. 5
1 Magnet assembly
2 Ignition aid
3 Ceramics disc
4 Anode ring
5 Cathode plate
6 Sensor housing with flange