SIGMA SQC-122c - Manual (Page 13)

Chapter 1 Quick Start
1-8
1.7 Depositing a Film
If you have followed this Quick Start chapter, you are ready to deposit a film.
Note: You can simulate the steps below, without actually depositing a film, by going to
the System Parameters Menu and selecting Simulate Mode ON. Simulate mode is
useful for testing processes before applying power to the evaporation supply. See
Section 3.6 for System Parameters Menu information.
Verify Output
Operation From the Main Menu, press the Next Menu SoftKey. Then,
press Auto/Manual to display Manual/Auto. Slowly turn the
control knob to increase the control voltage to your evaporation
supply. Verify that the Power(%) reading in the display upper
right-hand corner approximates the actual output of your
evaporation supply. If not, check your hookup (1.5), and refer
to Scale Voltage (3.6).
Verify Sensor
Operation Press Next Menu until the Switch Displays option is shown.
Press Switch Displays to display Sensor 1 and Sensor 2 in
the lower status section of the screen. At least one sensor
should be ON and display a % life of over 50%. If not, check
your sensor connections (1.5), and refer to Min/Max Frequency
(3.6).
Enter
Auto Mode Press the Next Menu key twice to display the output screen.
Press Manual/Auto until Auto/Manual is displayed.
Show
Power Graph Press Next Menu once more. Press the Next Graph SoftKey
until the graph shows Power (% vs. Time).
Start
Process Press the Start key to start the deposition process. Graphing
of the output power should start.
Caution: Observe the output power versus your evaporation
supply’s actual output. If there is a problem, press the Stop
SoftKey immediately.
If the rate and thickness readings do not match your expectations, refer to Appendix A
for information on Density and Z-Factor, and Section 2.4 for Tooling.
Please take time to review the remainder of this manual for detailed operational,
programming, and safety information.