SIGMA SQC-122c - Manual (Page 27)

Chapter 2 Operation
2-13
Enough preliminaries, let’s start the process!
Press Start from any of the main screen menus to start deposition. If the first layer
Start mode was programmed as Manual, you will need to press the Start Layer SoftKey
now to start the layer.
Note: Don’t confuse Manual and Auto Start mode with the Manual/Auto SoftKey.
Manual Start is a Process setup parameter that tells the SQC-122c to wait for operator
intervention before starting a Layer.
THICKNESS(kA)
0.057
RATE(A/s)
0.3
P O W E R ( % )
45.0
Film : Film1
L a y e r : 1 of 4
Process : My Process 1
Layer Rate : 8.00
Final Thick : 1.100
Run Time : 0:00:45
PHASE: Soak 2
100.0
50.0
0.0
0.0 25.0 50.0
Power (% vs. Time)
Next
M e n u
Zero
Auto /
Manual
Stop
Layer
Abort
12.5 37.5
Preconditioning
When Start is pushed, the process starts with the first layer preconditioning phase.
When preconditioning is complete, the deposition phase begins. The deposition phase
ends when Final Thickness is reached for the layer, then Feed and Idle phases run (if
programmed).
If the second layer is Auto Start, its cycle begins immediately when the first layer is
complete. If the second Layer is Manual Start, or it’s the last layer in the process, the
process halts and waits for operator intervention.
While the process is running, a Stop Layer SoftKey is shown (see above). Pressing
Stop Layer temporarily halts the current layer and displays two restart options, Start
Nxt Layer and Restart Layer.