SIGMA SQC-122c - Manual (Page 34)

Chapter 3 Menus
3-1
3.0 Introduction
SQC-122c operation during deposition is accomplished by pressing one of the six
SoftKeys along the left of the display. Five menus provide access to all programmable
and operating functions:
Main
Menu The Main Menu is displayed at power up. It provides the
SoftKey functions and display information necessary to run a
thin film deposition.
On the Main Menu, you can view additional sub-menus by
repeatedly pressing the Next Menu SoftKey. These sub-
menus are discussed in Section 3.2.
Quick Setup
Menu Provides immediate access to the most commonly adjusted
parameters for the current process and layer.
Process
Menu A process is a sequence of layers of deposited film(s). Each
layer in a process has a specific film, final thickness, and
deposition rate(s) associated with it. These are accessed from
the Process Menu.
Film
Menu A film is basically a material plus the setup information
necessary to deposit that material. Settings on the Film Menu
include pre/post conditioning, deposition error controls, and the
physical chamber setup for that material.
System
Parameters
Menu System parameters control the overall operation of the SQC-
122c. Tooling, crystal frequency, and operating modes are
examples of settings found on the System Parameters Menu.
The remainder of this chapter provides a detailed explanation of each menu and its
settings.