Chapter 3 menus – SIGMA SQC-122c User Manual

Page 55

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Chapter 3

Menus

3-22

In the I/O Setup Menu, any number of “events” can be mapped to the eight digital inputs
and eight relay outputs. Options are set by selecting a relay or input and then turning
the control knob to select the desired setting. The following explains each event:

Relays

Explanation (closes when)

Source 1 Shutter

Deposit phase for films set to Output 1.

Source 2 Shutter

Deposit phase for films set to Output 2.

Sensor 1 Shutter

Shutter Delay and Deposit phases of films set to Sensor 1.

Sensor 2 Shutter

Shutter Delay and Deposit phases of films set to Sensor 2.

All Crystal Fail

All sensors assigned to this film have failed.

Sensor 1 Fail

Sensor 1 is assigned to this film, and has failed.

Sensor 2 Fail

Sensor 2 is assigned to this film, and has failed.

PreCond Phase

Process is in Ramp1, Soak1, Ramp2, or Soak2 phase.

Deposit Phase

Process is in Deposit phase.

SoakHold Phase

Process is in Soak/Hold phase.

Process Active

Process is running (not stopped).

Stopped

Process is stopped (not running).

Manual Mode

Process is in Manual mode (not under PID control).

Max Power

Active output is at maximum power (out of material?).

Time Setpoint

The process has been in Deposit phase the indicated time.

Thickness Setpoint

Thickness setpoint reached. Resets on start of next Layer.

Final Thickness

Final thickness reached. Resets on start of next Layer.

Pocket 1-8

Source pocket # (Single Mode) or BCD bit # (Multi mode)

Dual Crystal Shutter

Primary sensor in a dual sensor has failed.

None

This relay is not assigned to any event.

Inputs

Explanation (high input causes)

Abort Process

Abort the process. Can only restart at Layer 1.

Start Process

Start the process at Layer 1.

Stop Layer

Stop the active layer.

Restart Layer

Start the active layer.

Start Next Layer

Start the next layer.

Soak Hold

Delay the start of deposition.

Force Final Thickness

End deposition.

Zero Thickness

Reset thickness reading to zero.

Zero Time

Reset time setpoint counter to zero.

Start Process 1-25

Start the selected process.

Pocket Ready

The source indexer is on the desired pocket.

None

This input is not assigned.

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