Intended use functional principle trademarks – INFICON HPG400-SP ATM to High-Vacuum Gauge (Profibus) User Manual
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tira36e1-a (0310) BPG/HPG400 v1.cp
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The BPG400-SP and HPG400-SP gauges allow vacuum measurement of non
flammable gases and gas mixtures (pressure ranges
→ [1], [3] for BPG400-SP
and [4], [6] for HPG400-SP).
The gauges can be operated with an INFICON controller or another instrument or
control device.
The functions of the gauges are described in their respective operating manuals
(
→ [1], [2], [3] for BPG400-SP and [4], [5], [6] for HPG400-SP).
The integrated Profibus interface allows operating the gauge in connection with
other suitable devices in a Profibus network according to the standard described in
[6], [7].
SEMI
®
Semiconductor Equipment and Materials International, California
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Functional Principle
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