Maintenance steps 7.4.1, 4 maintenance steps – INFICON LDS3000 Modular Leak Detector User Manual
Page 45
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Maintenance
45
7.4
Maintenance steps
7.4.1
Change operating fluid reservoir of turbo molecular
pump
1
Shut down mass spectrometer module, see
.
2
Remove turbo molecular pump.
Flooding mass spectrometer and turbo molecular pump
The cover of the operating fluid reservoir cannot be unscrewed unless the reservoir
has been flooded.
1
Disconnect 24 V power supply pack from MSB box.
2
Wait until turbo molecular pump is drained (at least 1 min).
3
Allow the turbo molecular pump to cool down if necessary.
4
Open the ventilation screw slowly.
Turbo molecular pump is flooded until it reaches atmospheric pressure.
Fig: 5
Turbo molecular pump SplitFlow 80
1
Cover
2
O-ring
3
Operating fluid reservoir
4
Ventilation screw
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