INFICON SRT-422 Crucible Indexer - Manual (Page 15)

General Information & Specifications Page 13
Specifications Description
Rotational Ability
•4,6 or 8 Pocket Source (Uni or Bi-direction)
•Continuous Trough Source (1 of 8 speeds)
•UHV 4 pocket source (limited rotation)
•3 - 3 pocket ‘banana’ types
Rotational Speed
•Shaft speeds of up to 12 rpm
Path Finding
•Quickest path (CW, CCW) for multi-pocket source
Torque
•120 in-oz. at output shaft
Repeatability
•3° resolution and repeatability
Data Interface
•RS-232
Relay Interface
•Allows control from system or deposition
Manual Control
•Inputs/outputs for Remote Manual Control Panel
Safety Interlocks •Disallows rotation with beam power applied
Pocket Good
Indication •Indicated selected pocket is reached or retrograde motion is in
progress.
Size
•5.0w x 5.0h x 4.5d plus 1” shaft extensions
Weight
•3.5 lbs.
Power
•Input power 115/230 Volts ac/10 watts
Table 1.1: Specifications