INFICON SRT-422 Crucible Indexer - Manual (Page 25)

Operation Page 23
In this mode, the pocket-select codes whether issued via the front-panel thumbwheel or by a
remote device determine the hearth’s rotation speed. As the table below indicates, the pocket-
select codes for pockets 1 through 7 select rotation speeds ranging from .187 RPM to .845
RPM, and the pocket-select code for pocket 8 stops or prevents hearth rotation. Speed
changes can be made while the hearth is rotating.
Pocket Selected Hearth Rotation Speed
0 0 RPM
1 .845 RPM
2 .732 RPM
3 .630 RPM
4 .515 RPM
5 .405 RPM
6 .295 RPM
7 .187 RPM
8 0 RPM
Table 2.2: Hearth rotation speed in continuous mode.
Section 2.10: phase adjustment
A unique front-panel feature of the SRT-422 makes it easy to reset the home position
when hearth rotation is out of phase (i.e., when the home position is no longer centered within
the cutout in the top of the source). This phase adjustment can be accomplished in either of
two ways, both of which are described in detail below. The electromechanical method
necessitates breaking vacuum and lowering and swinging out the source tray. However, this
method allows extremely precise phase adjustment. The electronic method lets you reset the
home position using front panel controls alone. However, it may prove difficult to achieve the
desired accuracy with this method, as it entails judging the accuracy of the phase adjustment
while observing the source at an angle through a view port.
Electromechanical Method
DANGER: HIGH VOLTAGE
Observe all applicable high-voltage precautions in
performing the following procedure. These precautions
include making sure that the high-voltage is OFF and using a
properly connected grounding rod to neutralize any residual
charge on the structures on and around the source tray.
STEP NO. PROCEDURE
1 Make sure that the high-voltage power supply is switched OFF.
2 If the power supply is equipped with a key lock, remove it and keep it in your
pocket while you complete this procedure.
3 Lower the source tray, open the vacuum enclosure ‘ s access doors, and swing