INFICON SRT-422 Crucible Indexer User Manual
Page 43
Installation
Page 41
(a)
Make sure that the high-voltage power supply is switched OFF.
(b)
If the power supply is equipped with a keylock, remove it and keef, it in
your pocket while you complete this procedure.
2
Lower the source tray, open the vacuum enclosure’s access doors, and swing the
source tray out from the enclosure.
3
(This step may be skipped if a high-voltage power supply has not been connected
to the vacuum system in which you are installing the SRT-422.) Using a properly
connected grounding hook, touch the source tray and the frame of the vacuum
enclosure in several places to neutralize any residual high-voltage charge.
4
Remove the attachment nut and flat washer (see Fig. 2-7) from the rotary
feedthrough.
5
Put coupling PN 9015-0121-01 in place over the feedthrough input shaft and secure
the coupling to that shaft with the coupling’s upper set screw.
WARNING
To prevent binding during source rotation and to minimize
alignment problems, it is essential to use the same type of
flexible coupling to connect the feedthrough output shaft to
the source’s drive shaft.
6
Place the index-drive unit against the underside of the source tray so that the
feedthrough threaded shaft extends through the hole in the yoke that spans the top
of the drive unit. Make sure that the drive unit’s output shaft fits up into the coupling.
7
Lower the index drive unit enough to put the flat washer and attachment nut back in
place around the threaded portion of the feedthrough. Then restore the drive unit to
the position described in step 6.
8
Screw the attachment nut all the way on, tightening it to approximately 10 ft-lbs.
9
Secure the coupling to the drive unit by tightening the coupling’s lower set screw
against the drive unit's output shaft.
10
Connect the female 'D' connector on one end of the motor cable to the ‘D’
connector on the index-drive unit, securing the connection with the screws on the
‘D’ connector.
Section 3.10: Installing the Control Unit
Follow the procedure described below in mounting the control unit in a standard 1 9-inch
electronics rack.
STEP NO. PROCEDURE
1
Disconnect any cables that have been connected to the control unit’s rear panel.