Operation – INFICON SRT-422 Crucible Indexer User Manual

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Operation

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Section 2

Operation


The SRT-422 can be controlled remotely by the output relays of our STC-2002 and

STC-2000A Thin Film Deposition Controllers, or any other system controller. Additionally, it
can be controlled by a remote panel Manual Pocket Selection Switch or through either of two
standard computer interfaces. An Interlock input is provided to assure that rotation of multi-
pocket sources cannot occur while deposition power is being applied to the source.

Section 2.1: Automatic Operation


With the Auto/Man toggle switch in the Auto position (DOWN), the Indexer will be

controlled through the STC I/O Port or the RS232 Computer Interface. The Binary code
applied to the STC I/O port will direct the Indexer to the proper position. Signals are available
which indicate correct pocket position along with the safety interlock described above.

Section 2.2: Stalled Motor Indication on 7-Segment Display

In addition to indicating the current pocket location the 7-segment LED provides a stall

or jammed source indication. This is done by alternately flashing the 7-segment display
between the current pocket location and zero. (The green LED on the back panel of the
Indexer will also blink if the condition occurs). This flashing indicates the load on the Indexer
has exceeded the torque capacity of the Indexer and it is unable to move to the new desired
position. This usually means that an excess amount of material has accumulated on the
source such that it cannot rotate freely.

Section 2.3: Section overview

This section describes the operation of the SRT-422 with a variety of source hearth types. The specific
sections are

Control/Display

Features

Clockwise vs. Counterclockwise Pocket Numbering

Indexer Operation With Standard Multipocket Sources

Indexer Operation with 4-pocket UHV Sources

Indexer Operation With 3-pocket Sources That Have One Banana-Shaped Pocket

Indexer Operation With Continuous-Trough Hearths

Phase Adjustment

Rotation Speed and Torque Selection

Section 2.4: Control/display features

All of the indexer’s control/display features are on the control unit’s front panel, which is
illustrated in Figure below.

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