INFICON SRT-422 Crucible Indexer - Manual (Page 23)

Operation Page 21
4-pkt. UHV
(code 7)
Rotational range when indexer
is configured for bidirectional
motion in 4-pocket UHV mode
Figure 2.4: Illustration of a 4-pocket UHV source, indicating the position of the “software
barrier” implemented in this mode to prevent damage to the bellows attached to UHV hearths
in this area.
Section 2.8: Indexer operation with three-pocket sources that have one
banana shaped pocket
The SRT-422 can be configured to operate three-pocket sources that have two conventional
circular pockets 90º apart and one banana-shaped pocket, which can be either 12O°, 135°, or
145° in arc length or a source which has pockets 6O° apart and one 180° banana.
18
0
120
135 145
3-pkt., 120 banana
(code 10)
3-pkt., 135 banana
(code 11)
3-pkt., 145 banana
(code 12)
3-pkt., 180 banana
(code 13)
Figure 2.5: Three-pocket hearths with one banana-shaped pocket
When the indexer is properly configured to operate in this mode, selecting either pocket
1 or pocket 2 causes the indexer to rotate the hearth to one of the conventional circular
pockets. However, in this mode, the pocket-select codes for pockets 3-8 all select the banana-
shaped pocket. When the indexer receives any of these six pocket-select codes — either from
a remote device or from the front-panel thumbwheel — it first rotates the midpoint of the
“banana” to the home position. If the pocket-select code received by the indexer is one those
for pockets 3 through 7, the indexer then begins to oscillate the hearth in such a way that the
electron beam will sweep from one end of the “banana” to the other end. This oscillation
continues until the pocket selection is changed or until indexer rotation stops. Either because