INFICON SRT-422 Crucible Indexer User Manual
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Installation
Figure 3.8: Motor Drive Unit
Section 3.9: Installing the Index-Drive Unit
The Figure above shows the index-drive unit properly installed on the underside of the source
tray. The drive unit is held in place by the large nut on the underside of the 1 -inch-dia. rotary
feedthrough.
DANGER: HIGH VOLTAGE
If a high-voltage power supply is installed in the vacuum
system in which the SRT-422 is to be installed, observe all
applicable high-voltage precautions in performing the
following procedure. These precautions include making sure
that the high-voltage is OFF and using a properly connected
grounding rod to neutralize any residual charge on the
structures on and around the source tray.
Follow the procedure described below in installing the drive unit.
STEP NO.
PROCEDURE
1
Perform the following sub steps only if a high-voltage power supply is connected to
the vacuum system in which the SRT-422 is being installed. Otherwise, proceed to
step 2.