INFICON SRT-422 Crucible Indexer - Manual (Page 5)

Table of Contents Page 3
Preface
Table of Contents
Preface........................................................................................................................................... 3
Table of Contents ...................................................................................................................... 3
List of Figures............................................................................................................................ 4
List of Table............................................................................................................................... 5
Warranty ........................................................................................................................................ 6
SYCON INSTRUMENTS, INC. ................................................................................................. 6
EQUIPMENT RETURN ............................................................................................................. 6
EC Declaration of Conformity.................................................................................................... 8
Section 1...................................................................................................................................... 11
General Information & Specifications ...................................................................................... 11
Section 1.1: Introduction................................................................................................................................. 11
Section 1.2: Unpacking................................................................................................................................... 11
Section 1.3: Specifications .............................................................................................................................. 12
Section 2...................................................................................................................................... 17
Operation ................................................................................................................................ 17
Section 2.1: Automatic Operation.................................................................................................................... 17
Section 2.2: Stalled Motor Indication on 7-Segment Display ......................................................................... 17
Section 2.3: Section overview ........................................................................................................................ 17
Section 2.4: Control/display features............................................................................................................... 17
Section 2.5: Clockwise vs. counterclockwise pocket numbering ................................................................... 19
Section 2.6: Indexer operation with standard multipocket sources ................................................................ 19
Section 2.7: Indexer operation with 4-pocket UHV sources........................................................................... 20
Section 2.8: Indexer operation with three-pocket sources that have one banana shaped pocket................. 21
Section 2.9: Indexer operation with continuous trough hearths ..................................................................... 22
Section 2.10: phase adjustment ...................................................................................................................... 23
Electromechanical Method......................................................................................................................... 23
Electronic Method ...................................................................................................................................... 24
Section 2.11: Rotation speed and torque selection for pocket seeking .........................................................25
Section 3...................................................................................................................................... 29
Installation ............................................................................................................................... 29
Section 3.1: Introduction.................................................................................................................................. 29
Section 3.2: Electrical Connections and Descriptions ..................................................................................... 29
Line Voltages ............................................................................................................................................. 29
Section 3.3: Internal Configuration Switches................................................................................................... 30
Section 3.4: setting the configuration dip switches.......................................................................................... 31
Section 3.5: Description of Configuration Switches........................................................................................ 32
Standard Multi-pocket Sources (Codes 0-5).............................................................................................. 34
UHV 4-Pocket Sources (Code 7) ............................................................................................................... 34
Three-Pocket Hearths with One Banana-Shaped Pocket (Codes 10-13) ................................................. 35
Hearths with Full-Circle Evaporant Troughs (Code 2) ............................................................................... 36
Section 3.6: configuring the opto-isolator pc board for 24-vdc I/Os ................................................................ 37
Section 3.7: Initial Bench Test ........................................................................................................................ 38
Section 3.8: System Installation ..................................................................................................................... 39
Section 3.9: Installing the Index-Drive Unit .................................................................................................... 40
Section 3.10: Installing the Control Unit ......................................................................................................... 41
Section 3.11: Indexer and System Grounding................................................................................................ 42
Section 3.12: initial phase adjustment .............................................................................................................. 43
Electromechanical Method......................................................................................................................... 43
Electronic Method ...................................................................................................................................... 44