List of table – INFICON SRT-422 Crucible Indexer User Manual

Page 7

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List of Table

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Figure 2.4: Illustration of a 4-pocket UHV source, indicating the position of the “software

barrier” implemented in this mode to prevent damage to the bellows attached to
UHV hearths in this area. ................................................................................................ 21

Figure 2.5: Three-pocket hearths with one banana-shaped pocket ................................................. 21
Figure 2.6: Illustration of a continuous-trough hearth ...................................................................... 22
Figure 3.1: SRT-422 Motor Drive unit. ............................................................................................. 29
Figure 3.2: Line Voltage Selection Switch ....................................................................................... 30
Figure 3.3: SRT-422 Rear Panel ..................................................................................................... 30
Figure 3.4: Configuration Switch...................................................................................................... 32
Figure 3.5: Orientation of pocket numbering changes depending on the setting of DIP switch 6 .... 33
Figure 3.6: Source types supported by the SRT-422....................................................................... 34
Figure 3.7: Locations of screws that secure the control unit’s rear panel to its body ....................... 37
Figure 3.8: Motor Drive Unit............................................................................................................. 40
Figure 3.9: SRT-422 Grounding ...................................................................................................... 42
Figure 3.10: Control/display features on the control unit’s front panel ............................................. 43
Figure 3.11: Pinout for the rear panel I/O (ISOLATED connector.................................................... 46
Figure 3.12: Connections required for RS-232 communications between the SRT-422 and a

remote device with a 9-pin RS-232 port and a 25 pin RS-232 port. ................................ 48

Figure 5.1: Signal Flow Diagram ..................................................................................................... 61

List of Table

Table 1.1: Specifications.................................................................................................................. 13
Table 2.1: Speed of Hearth in Banana Mode................................................................................... 22
Table 2.2: Hearth rotation speed in continuous mode. ................................................................... 23
Table 2.3: Rotation Speed and Torque............................................................................................ 25
Table 3.1: Codes 0 – 5 DIP Switches settings................................................................................. 34
Table 3.2: Code 7 DIP switch settings ............................................................................................. 34
Table 3.3: Codes 10 – 13 DIP switch settings ................................................................................. 35
Table 3.4: Hearth rotation in continuous mode . .............................................................................. 36
Table 3.5: Pocket-select codes input via pins 1, 2, and 7 **SEL2 not required for four pocket

configurations .................................................................................................................. 46

Table 3.6: Pocket-position codes output via pins 4, 8, and 9........................................................... 46
Table 5.1: Trouble Shooting guide................................................................................................... 62

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