INFICON Crystal 12 Sensor - Manual (Page 13)

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Crystal12 Sensor Operating Manual
Chapter 1
Sensor Specifications
1.1 Specifications for Crystal12 Sensor 750-667-G1
The Crystal12 sensor is a twelve crystal quartz crystal deposition monitor
transducer. When the monitor crystal being used fails, a new crystal is advanced
into position, fully replacing the failed crystal’s function. The mechanism used for
providing this motion is pneumatically powered. The logic for automatic operation
of this transducer is provided with the Cygnus™ Deposition Controller.
See
Figure 1-1 and Table 1-1 .
Figure 1-1 Crystal12 Sensor
Table 1-1 Sensor Specification
Maximum bakeout temp with no water 130 °C
Maximum operating isothermal
environment temperature with minimum
water flow 300 °C
Size (maximum envelope) 4.0" (102 mm) dia. x 3.3" (84 mm) high
4.75" (121 mm) dia. x 3.46" (88 mm) with
optional mounting posts installed
Water, air and coax length Standard 30" (762 mm)
Crystal exchange Front-loading
Mounting Six #4-40 tapped holes on the back of the
sensor body, six #4-40 tapped holes on
outside circumference. Three #6-32
tapped holes with optional mounting kit.