INFICON Crystal 12 Sensor - Manual (Page 33)

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Crystal12 Sensor Operating Manual
Because of geometric factors, variations in surface temperature, and differences in
electrical potential, the crystal and substrates often do not receive the same
amount of material. If you want the thickness indication on the controller to
represent the thickness on the substrates, calibration is required to determine the
tooling. Consult your controller’s manual for the proper procedure for obtaining the
tooling factor.
CAUTION
Use of more than 80" (2 meters) of 1/8" tubing between
the valve and the bellows may cause a switcher failure
because of the time required to bleed out sufficient air
during de-pressurization. If tubing greater than 1/8" is
used, the maximum length must be reduced proportional
to the additional volume.
2.4 Crystal12 Sensor Installation when
used with Cygnus
2.4.1 Changing Crystal Sensor Type and
Programming the Relay Outputs
1 Display the Hardware # Display (see Figure 2-3 ).
Figure 2-3 Display Tree for HARDWARE # Display.
ALL CHANNELS Display
F6 CHANNEL
CHANNEL # Display (# designates Channel number selected)
F1 Channel Parms
PROCESS # Display
F1 Hardware Parms
HARDWARE # Display