INFICON Crystal 12 Sensor - Manual (Page 28)

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Crystal12 Sensor Operating Manual
position 12 is displayed as the assumed current position until the change-out is
complete and a rotate head or crystal switch function is performed. At the end of
the rotate head function, the sensor will be at position number 1.
Replacement of the twelve monitor crystals requires the removal of the two
fasteners (item 4,
Figure 1-8 on page 1-11 ) that secure the two halves (items 1 and
3) of the assembly.
Exchanging the crystals is accomplished by inverting the plate (item 1, Figure 1-8
on page 1-11 ) containing the used crystals and installing the new crystals (item 2)
in the orientation shown in Figure 1-8 on page 1-11 .
Reassemble the crystal carousel assembly by orientating the pin protruding from
item 1 (refer to
Figure 1-8 on page 1-11 ) with the hole provided in item 3, then
securing the two halves with fasteners (item 4).
To install the carousel assembly into the Crystal12 sensor, grasp the carousel
assembly by the protruding hub and orient the locating hole of the carousel
assembly (item 15,
Figure 1-5 on page 1-8 ) with the #6-32 location screw (item 21,
Figure 1-5 on page 1-8 ). The carousel assembly should snap into place.
Orient and attach the front deposition shield (item 17, Figure 1-5 on page 1-8 ) to
the carousel housing (item 14, Figure 1-5 on page 1-8 ) using the two knurled
captive fasteners.
The crystal status and "Carousel Change-Out" message on the Cygnus display will
remain unchanged subsequent to a carousel replacement until one of the following
occurs.
Š A "Rotate Head" function is initiated via remote communications, or from the
front display soft key of either the ALL CHANNELS MAINTENANCE display or
the individual CHANNEL SENSOR MAINTENANCE display. This is the
preferred method because it ensures the correct position is detected while
providing an accurate accounting of good and failed crystals.
Š A crystal switch function via the front display "soft key", hand held controller or
remote communication is initiated.
Š The user manually rotates the carousel to make electrical contact.
When the Cygnus detects a crystal position, the "Carousel Change-Out" message
is removed and all crystals are labeled as good.
2.2 Pre-installation Sensor Check
Prior to installing the sensor in the vacuum system, you should make certain it is in
proper working condition by following the procedure outlined below.